Design and construction of LED dust-free workshop

Production environment requirements of LED dust-free workshop:
The air cleanliness grade and form of the clean room shall be determined according to the requirements of the production process on the production environment

  In case of one of the following situations, the air purification and conditioning system should be set separately:
  2 clean rooms with large differences in temperature and humidity base and allowable fluctuation range;
  3
Purified air conditioning system and general air conditioning system;
  4
Clean rooms with great difference in heating and moisture dissipation of process equipment in clean rooms;
  5 purification air conditioning system with excessive air volume

The shoe changing room should be equipped with a whole room exhaust system of no less than 10 times / h, and the exhaust outlet should be set at the lower part; The shoe changing cabinet should be provided with local ventilation measures; The primary dressing room should be equipped with a whole room exhaust system of no less than 5 times / h

The fresh air of the purified air conditioning system shall be treated centrally, and the setting of the fresh air treatment unit shall comply with the following provisions:
  1
The forced draft fan shall adopt automatic speed regulation measures;
  2
The air should be treated by coarse efficiency, medium efficiency and high efficiency filters;
  3 the fresh air treatment unit shall have good air tightness, and the air leakage rate under working pressure shall not be greater than 1%

The circulating air of the purified air conditioning system in the lithography room should be treated by fan filter unit and dry cooling coil, and the circulating air of the purified air conditioning system in other clean rooms should be treated by circulating air treatment unit

The purified air conditioning system in the metal organic compound chemical vapor deposition room shall be set independently

The circulating air treatment unit should adopt dry cooling to treat the air

Automatic speed regulation measures shall be taken for the fan of circulating air treatment unit

The design of air conditioning heating and humidification system shall be conducive to the utilization of plant waste heat

The fresh air intake of the purified air conditioning system shall be far away from the exhaust outlet discharging harmful or combustible substances

The net height of the upper technical interlayer shall be determined according to the air conditioning equipment, pipeline layout, clean air flow control and other factors, and shall not be less than 2m

LED production should include epitaxial wafer growth, die (chip) manufacturing and die (chip) packaging